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Conductivity and Microstructure of Combinatorially Sputter-Deposited Ta–Ti–Al Nitride Thin Films
Ta-Ti-Al nitride thin films with only ~20 at.% Ti may enable PEM fuel cell catalyst supports that are both conductive and durable.
James R. O’Dea, Megan E. Holtz, Anna E. Legard, Samuel D. Young, Raymond G. Burns, Abigail R. Van Wassen, David A. Muller, Héctor D. Abruña, Francis J. DiSalvo, R. Bruce van Dover, John A. Marohn
Conductivity and Microstructure of Combinatorially Sputter-Deposited Ta–Ti–Al Nitride Thin Films